Electromechanical Transducers: Principles and Technologies

Suggested readings

H. Bruus, Theoretical Microfluidic, Oxford University Press, Canada, 2007.

G. Hairer, M.J. Vellekoop, An integrated flow-cell for full sample stream control, Microfluid Nanofluid, 7:647-658, 2009, DOI 10.1007/s10404-009-0425-6.

M. Krommer, H. Irschik, Sensor and actuator design for displacement control of continuous systems, Smart Structures and Systems, Vol. 3, No. 2, 147-172, 2007.

H. Irschik, M. Krommer, Y. Vetyukov, On the Use of Piezoelectric Sensors in Structural Mechanics: Some novel strategies, Sensors, 10 (6), 5626-5641, 2010.

R. Lerch, G. Sessler, D. Wolf, Technische Akustik Grundlagen und Anwendungen, Springer-Verlag Berlin Heidelberg, 1st ed. 2009, ISBN: 978-3-540-23430-2.

R. Lerch, Elektrische Messtechnik Analoge, digitale und computergestützte Verfahren, Springer-Verlag Berlin Heidelberg, 7th ed. 2016, ISBN: 978-3-662-46940-8.

P.P.L. Regtien, Piezoelectric sensors in Sensors for Mechatronics, Elsevier, Amsterdam (NL), Ch. 8, 219-239, 2012, ISBN: 978-0-12-391497-2.

V. Ferrari, Printed thick-film piezoelectric and pyroelectric sensors, in Printed films: Materials science and applications in sensors, electronics and photonics M. Prudenziati and J. Hormadaly (Eds.), Woodhead Publishing Limited, Cambridge (UK), Ch. 9, 221-258, 2012, ISBN: 978 1 84569 988 8.

V. Ferrari, R. Lucklum, Overview of Acoustic-Wave Microsensors, in Piezoelectric Transducers and Applications 2nd edition, A. Arnau Vives Ed., Springer-Verlag Berlin Heidelberg, 39-62, 2008, ISBN: 978-3-540-77507-2.

M. Madou, Fundamentals of Microfabrication and Nanotechnology, 3rd ed., CRC Press, 2011.

G. T. A. Kovacs et al., Bulk micromachining of silicon, Proc. IEEE, vol. 86, no. 8, pp. 1536-1551, 1998.

J. M. Bustillo et al., Surface micromachining for microelectromechanical systems, Proc. IEEE, vol. 86, no. 8, pp. 1552-1574, 1998.

F. Herrmann, B. Jakoby, J. Rabe, and S. Büttgenbach, Microacoustic sensors for liquid monitoring, Sensors Update, 9(1), 105-160, 2001.

B. Jakoby, M.J. Vellekoop, Physical sensors for liquid properties, IEEE Sensors Journal 11.12, pp.3076-3085, 2011.


See also