Mechanical Size-Effects of Materials: Processing, Characterization and Modeling
Suggested readings
Machlin, E.S. 1995. Materials science in microelectronics: The relationships between thin film processing and structure, Giro Press, Croton-on-Hudson.
Ohring, M. 2002. Materials Science of Thin Films, Academic Press.
Freund, LB, Suresh, S. 2004. Thin Film Materials: Stress, Defect Formation and Surface Evolution, Cambridge University Press.
Hosford WF 2005. Mechanical Behavior of Materials, Cambridge University Press.
Fischer-Cripps, A.C. 2004. Nanoindentation, Springer, New York, 2nd Ed.